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Diffuse neutron reflectivity and AFM study of interface morphology of an electro-deposited Ni/Cu film

机译:弥散中子反射率和aFm界面形态研究   电沉积Ni / Cu薄膜

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摘要

We present a detailed study of the interface morphology of anelectro-deposited (ED) Ni/Cu bilayer film by using off-specular (diffuse)neutron reflectivity technique and Atomic Force Microscopy (AFM). The Ni/Cubilayer has been electro-deposited on seed layers of Ti/Cu. These two seedlayers were deposited by magnetron sputtering. The depth profile of density inthe sample has been obtained from specular neutron reflectivity data. AFM imageof the air-film interface shows that the surface is covered by globular islandsof different sizes. The AFM height distribution of the surface clearly showstwo peaks [Fig. 3] and the relief structure (islands) on the surface in thefilm can be treated as a quasi-two-level random rough surface structure. Wehave demonstrated that the detailed morphology of air-film interfaces, thequasi-two level surface structure as well as morphology of the buriedinterfaces can be obtained from off-specular neutron reflectivity data. We haveshown from AFM and off-specular neutron reflectivity data that the morphologiesof electro-deposited surface is distinctly different from that ofsputter-deposited interface in this sample. To the best of our knowledge thisis the first attempt to microscopically quantify the differences inmorphologies of metallic interfaces deposited by two different techniques viz.electro-deposition and sputtering.
机译:我们通过使用镜面(扩散)中子反射技术和原子力显微镜(AFM)对电沉积(ED)Ni / Cu双层膜的界面形态进行了详细研究。 Ni / Cubilayer已电沉积在Ti / Cu的晶种层上。通过磁控溅射沉积这两个种子层。样品中密度的深度分布已从镜中子反射率数据获得。气膜界面的AFM图像显示表面被大小不同的球状岛所覆盖。表面的AFM高度分布清楚地显示了两个峰[图2。 [3]和膜表面上的浮雕结构(岛)可被视为准两级随机粗糙表面结构。我们已经证明,可以从非镜面中子反射率数据获得气膜界面的详细形态,准二级表面结构以及掩埋界面的形态。从原子力显微镜和镜面中子反射率数据可以看出,该样品中电沉积表面的形貌与溅射沉积界面的形貌明显不同。据我们所知,这是首次尝试通过显微镜量化通过两种不同技术(即电沉积和溅射)沉积的金属界面的形貌差异。

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